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Hitachi Industrial Equipment Systems Clean Air Device Class III GB Type

Exhaust HEPA double-layer, high airtightness, Class III cabinet with enhanced containment properties.

Features - Double exhaust HEPA filter - Leak test using halogen gas pressurization method. Ensures airtight performance with a leak rate of less than 10-6 ml/s at a pressure of 735 Pa - Standard equipment includes a differential pressure gauge for internal pressure display

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